DESIGN AND FABRICATION OF SURFACE MICROMACHINED MICROMOTORS WITH LARGE DIMENSIONS

Authors
KRAUS T BALTZER M OBERMEIER E
Citation
T. Kraus et al., DESIGN AND FABRICATION OF SURFACE MICROMACHINED MICROMOTORS WITH LARGE DIMENSIONS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 196-199
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
7
Issue
3
Year of publication
1997
Pages
196 - 199
Database
ISI
SICI code
0960-1317(1997)7:3<196:DAFOSM>2.0.ZU;2-R
Abstract
Micromotors with enlarged 800 mu m and 1200 mu m rotor diameters are d escribed in this paper. A large driving torque was obtained by fabrica ting up to 234 stator and 156 rotor electrodes, Microbridges were used to connect the stator electrodes to the electrical lines and two diff erent electrode designs were investigated. The most favourable electro de geometry and the driving torque was determined by simulating the fo rce per pole. The surface micromachined micromotors have been fabricat ed and tested successfully.