A CAPACITIVE DIFFERENTIAL PRESSURE SENSOR WITH POLYIMIDE DIAPHRAGM

Authors
PEDERSEN M MEIJERINK MGH OLTHUIS W BERGVELD P
Citation
M. Pedersen et al., A CAPACITIVE DIFFERENTIAL PRESSURE SENSOR WITH POLYIMIDE DIAPHRAGM, Journal of micromechanics and microengineering, 7(3), 1997, pp. 250-252
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
7
Issue
3
Year of publication
1997
Pages
250 - 252
Database
ISI
SICI code
0960-1317(1997)7:3<250:ACDPSW>2.0.ZU;2-A
Abstract
A capacitive differential pressure sensor has been developed. The proc ess used for the fabrication of the sensor is IC-compatible, meaning t hat the device can potentially be monolithically integrated on one chi p with a suitable signal conditioning circuit. A sensor for a differen tial pressure range of +/-1 bar was fabricated and tested with a frequ ency modulated detection circuit, and good agreement was found with th e theoretical model of the sensor. A nominal sensitivity Delta C/C of 18% has been measured for a positive differential pressure of 1 bar.