LASER-DRIVEN PULSED PLASMA CVD OF CARBON-FILMS FROM GAS-MIXTURES

Authors
AGEEV VP KONOV VI UGAROV MV UGLOV SA
Citation
Vp. Ageev et al., LASER-DRIVEN PULSED PLASMA CVD OF CARBON-FILMS FROM GAS-MIXTURES, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 61(7), 1997, pp. 1375-1382
Citations number
9
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
61
Issue
7
Year of publication
1997
Pages
1375 - 1382
Database
ISI
SICI code
0367-6765(1997)61:7<1375:LPPCOC>2.0.ZU;2-W