IN-SITU PULSED-LASER DEPOSITION OF LARGE-AREA CERAMIC AND MULTILAYER FILMS FOR APPLICATIONS IN INDUSTRY

High-quality superconducting films have been deposited onto 2 in, diam eter substrates in a large-area pulsed laser deposition (PLD) system i ncorporating a novel pseudoblackbody radiation heater. A KrF laser (la mbda = 248 nm) was rastered across the radius of a rotating target and a slot in the blackbody heater collected the ablation plume onto a ro tating substrate holder, critical temperatures of > 90 K with critical current densities of 2-4 MA/cm(2) were measured across a 2 in. diam Y Ba2Cu3O7-delta (YBCO) film deposited on an LaAlO3 (LAO) substrate, Met al atom concentrations were measured by Rutherford backscattering spec trometry to be nearly stoichiometric and the film thickness uniformity was +/-7% about the mean. Purely c-axis orientation was observed in t he x-ray diffraction patterns, A multilayer LAO/YBCO film was deposite d in situ on an MgO substrate using a large-area target load-lock cham ber and exhibited good crystalline quality. YBCO films deposited onto both sides of a 1 in. square by 0.010-in.-thick MgO substrate were pat terned and fabricated into a four-channel microwave receiver operating near 10 GHz. The receiver exhibited low loss and good frequency selec tivity at 77 K. (C) 1997 American Institute of Physics.