This paper illustrates a smart sensor system for carbon monoxide detec
tion. An innovative technological approach has been pursued to fabrica
te gas sensors on silicon substrate, compatible with IC fabrication. A
mixed analog-digital electronic interface processes the outputs of th
ree sensors to compensate relative humidity and interfering gases. Sig
ma-delta signal processing and low-frequency noise reduction technique
s are used to minimize silicon area and to meet the required performan
ce in a standard CMOS technology.