NEW-GENERATION SPUTTERING AND PLASMA POLYMERIZATION PLANT FOR REFLECTOR PRODUCTION

Citation
H. Grunwald et al., NEW-GENERATION SPUTTERING AND PLASMA POLYMERIZATION PLANT FOR REFLECTOR PRODUCTION, Surface & coatings technology, 93(1), 1997, pp. 99-104
Citations number
7
Categorie Soggetti
Materials Science, Coatings & Films
ISSN journal
02578972
Volume
93
Issue
1
Year of publication
1997
Pages
99 - 104
Database
ISI
SICI code
0257-8972(1997)93:1<99:NSAPPP>2.0.ZU;2-3
Abstract
Derived from the working principle of high-throughput single disc CD c oating machines, a new generation of coating plants for shaped parts s uch as car head light reflectors with aluminum and a corrosion protect ion top layer has been developed. The machine processes small batches of parts at short repetition times, passing them through a load lock a nd active chambers for plasma pretreatment, sputtering and, finally, p lasma polymerization. The system offers new production opportunities c ompared with the traditional large evaporation systems. In contrast to evaporation, alloys also can be deposited. The conformity of the laye rs to even very complex part geometries - even recesses - is excellent and the handling can be automated easily. (C) 1997 Elsevier Science S .A.