The geometrical extension of glow discharges to technically relevant d
imensions in order to deposit thin plasma polymer films is not trivial
. The deposition process itself is rather complex and it is governed b
y the correlation of discharge sustaining processes with chemical reac
tions. Due to the up-scaling procedure, the basic problems concern the
kinetics of plasma chemical gas conversion, transport of film growing
species and volatile reaction products, and the energetic situation i
n front of the substrate. (C) 1997 Elsevier Science S.A.