PROBLEMS OF LARGE-SCALE DEPOSITION OF THIN PLASMA POLYMER-FILMS

The geometrical extension of glow discharges to technically relevant d imensions in order to deposit thin plasma polymer films is not trivial . The deposition process itself is rather complex and it is governed b y the correlation of discharge sustaining processes with chemical reac tions. Due to the up-scaling procedure, the basic problems concern the kinetics of plasma chemical gas conversion, transport of film growing species and volatile reaction products, and the energetic situation i n front of the substrate. (C) 1997 Elsevier Science S.A.