A THEORETICAL EVALUATION OF MEGASONIC CLEANING FOR SUBMICRON PARTICLES

Authors
OLIM M
Citation
M. Olim, A THEORETICAL EVALUATION OF MEGASONIC CLEANING FOR SUBMICRON PARTICLES, Journal of the Electrochemical Society, 144(10), 1997, pp. 3657-3659
Citations number
8
Categorie Soggetti
Electrochemistry
Journal title
Journal of the Electrochemical Society → ACNP
ISSN journal
00134651
Volume
144
Issue
10
Year of publication
1997
Pages
3657 - 3659
Database
ISI
SICI code
0013-4651(1997)144:10<3657:ATEOMC>2.0.ZU;2-K
Abstract
The physics of megasonic cleaning is investigated. A novel particle re moval mechanism is analyzed, and the relevant quantities are evaluated . It is shown that the megasonic removal force scales as the cube of t he particle diameter, and that megasonic cleaning technology cannot re move particles of 0.1 mu m and smaller. Therefore, megasonic cleaning is unlikely to be a viable technology for manufacturing devices whose linewidth is below 0.35 mu m.