ORGANIC AND INORGANIC SPIN-ON POLYMERS FOR LOW-DIELECTRIC-CONSTANT APPLICATIONS

Authors
HACKER NP
Citation
Np. Hacker, ORGANIC AND INORGANIC SPIN-ON POLYMERS FOR LOW-DIELECTRIC-CONSTANT APPLICATIONS, MRS bulletin, 22(10), 1997, pp. 33-38
Citations number
25
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
22
Issue
10
Year of publication
1997
Pages
33 - 38
Database
ISI
SICI code
0883-7694(1997)22:10<33:OAISPF>2.0.ZU;2-T