MATERIALS ISSUES AND CHARACTERIZATION OF LOW-K DIELECTRIC MATERIALS

Authors
RYAN ET MCKERROW AJ LEU JP HO PS
Citation
Et. Ryan et al., MATERIALS ISSUES AND CHARACTERIZATION OF LOW-K DIELECTRIC MATERIALS, MRS bulletin, 22(10), 1997, pp. 49-54
Citations number
35
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
22
Issue
10
Year of publication
1997
Pages
49 - 54
Database
ISI
SICI code
0883-7694(1997)22:10<49:MIACOL>2.0.ZU;2-0