INTEGRATION OF LOW-K DIELECTRIC MATERIALS INTO SUB-0.25-MU-M INTERCONNECTS

Authors
LIST RS SINGH A RALSTON A DIXIT G
Citation
Rs. List et al., INTEGRATION OF LOW-K DIELECTRIC MATERIALS INTO SUB-0.25-MU-M INTERCONNECTS, MRS bulletin, 22(10), 1997, pp. 61-69
Citations number
37
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
22
Issue
10
Year of publication
1997
Pages
61 - 69
Database
ISI
SICI code
0883-7694(1997)22:10<61:IOLDMI>2.0.ZU;2-M