Fs. Shieu et Mh. Shiao, MEASUREMENT OF THE INTERFACIAL MECHANICAL-PROPERTIES OF A THIN CERAMIC COATING ON DUCTILE SUBSTRATES, Thin solid films, 306(1), 1997, pp. 124-129
The interfacial mechanical properties of two systems, SiOx/Au and SiOx
/Cu, were measured by a modified periodic cracking method. The state o
f stress in the SiOx-coated metal wires with cylindrical symmetry were
analyzed using a classic model of continuum elasticity. Experimentall
y, the measurement was carried out by a uniaxial tensile test. Specime
ns for the tensile test were prepared by depositing a thin layer of Si
Ox on the metal wires by a plasma enhanced chemical vapor deposition (
PECVD) technique. After tensile loading, it was found that the fractur
e morphology of the SiOx coating depended upon the bonding strength of
the interfaces. For a weak interface such as SiOx/Au with a measured
bonding strength of 0.230 MPa, debonding at the interface prevailed an
d most of the cracks in the SiOx coating were inclined to the tensile
axis by 45 degrees. In contrast, cracks in the coating of a strong int
erface such as SiOx/Cu showed periodicity and were perpendicular to th
e tensile axis. The bonding strength of the interface was estimated to
be, at least, 0.885 MPa, while the ultimate shear strength was measur
ed to be 49.5 MPa. (C) 1997 Elsevier Science S.A.