ENERGY-DISTRIBUTION OF IONS ESCAPING FROM A BEAM-PLASMA-DISCHARGE

Authors
ISAEV NV KOCHMAREV LY SHUSTIN EG
Citation
Nv. Isaev et al., ENERGY-DISTRIBUTION OF IONS ESCAPING FROM A BEAM-PLASMA-DISCHARGE, Plasma physics reports, 23(10), 1997, pp. 891-894
Citations number
7
Categorie Soggetti
Phsycs, Fluid & Plasmas
Journal title
Plasma physics reports → ACNP
ISSN journal
1063780X
Volume
23
Issue
10
Year of publication
1997
Pages
891 - 894
Database
ISI
SICI code
1063-780X(1997)23:10<891:EOIEFA>2.0.ZU;2-V
Abstract
The energy distribution function of ions escaping from a beam-plasma d ischarge in a weak magnetic field is studied. The configuration and pa rameters of the discharge correspond to those of a plasmachemical reac tor that can be applied in microelectronics technology. It is shown th at the parameters of the ion energy distribution in this flow are clos e to the optimum parameters required for depositing thin films.