We have prepared silicon oxycarbides by the pyrolysis of siloxane poly
mers at a maximum temperature of 1000 degrees C. The resulting silicon
oxycarbides are networked glasses which we believe also contain some
graphene sheets. After washing in a dilute solution of hydrofluoric ac
id for times between 2 min and 24 h, these materials lost, at most, 40
% of their mass. Powder X-ray diffraction (XRD), small-angle scatterin
g (SAX), BET surface area measurements, elemental analysis, and silico
n K-edge X-ray absorption spectroscopy (XAS) were used to determine th
e physical structure of the bulk material and the local chemical envir
onments of the Si atoms. It was found that a microscopic pore network
was created in the material upon HF washing. The number of pores, but
not their size, increased with HF washing time. The HF etching reveale
d a passivating layer, which we believe consists mainly of silicon and
carbon, that prevented further etching of the material. The electroch
emical behavior of these materials in Li batteries was not affected by
the radical changes in surface chemistry.