TRACE-ELEMENT DETERMINATION OF HIGH-PURITY CHEMICALS FOR THE PROCESSING OF SEMICONDUCTORS WITH HIGH-RESOLUTION ICP MASS-SPECTROMETRY USING STABLE-ISOTOPE DILUTION ANALYSIS (IDA)

The demand for trace element analysis in many fields of application ha s significantly increased in the last few years. Accuracy is fundament al to analysis and the importance of accurate measurements is widely a ccepted. Yet most instrumental analytical methods are relative methods and accuracy is established by using certified reference materials fo r method validation and calibration or by use of a definitive method a s isotope dilution analysis (IDA). In this work a new high-resolution ICP mass spectrometer Finnigan MAT ''ELEMENT'', which provides mass sp ectral resolution of 300 up to 7500 and thus eliminates most of the sp ectral interferences quadrupol mass analyzers are suffering from, is a pplied in combination with IDA to evaluate the capabilities of these t echniques to the accurate determination of element traces in processin g chemicals for semiconductor production.