TRACE-ELEMENT DETERMINATION OF HIGH-PURITY CHEMICALS FOR THE PROCESSING OF SEMICONDUCTORS WITH HIGH-RESOLUTION ICP MASS-SPECTROMETRY USING STABLE-ISOTOPE DILUTION ANALYSIS (IDA)
J. Dahmen et al., TRACE-ELEMENT DETERMINATION OF HIGH-PURITY CHEMICALS FOR THE PROCESSING OF SEMICONDUCTORS WITH HIGH-RESOLUTION ICP MASS-SPECTROMETRY USING STABLE-ISOTOPE DILUTION ANALYSIS (IDA), Fresenius' journal of analytical chemistry, 359(4-5), 1997, pp. 410-413
The demand for trace element analysis in many fields of application ha
s significantly increased in the last few years. Accuracy is fundament
al to analysis and the importance of accurate measurements is widely a
ccepted. Yet most instrumental analytical methods are relative methods
and accuracy is established by using certified reference materials fo
r method validation and calibration or by use of a definitive method a
s isotope dilution analysis (IDA). In this work a new high-resolution
ICP mass spectrometer Finnigan MAT ''ELEMENT'', which provides mass sp
ectral resolution of 300 up to 7500 and thus eliminates most of the sp
ectral interferences quadrupol mass analyzers are suffering from, is a
pplied in combination with IDA to evaluate the capabilities of these t
echniques to the accurate determination of element traces in processin
g chemicals for semiconductor production.