EFFECTS OF SOL-GEL PROCESSING PARAMETERS AND SUBSTRATES ON CRYSTALLIZATION OF POTASSIUM TANTALATE-NIOBATE THIN-FILMS

Potassium tantalate-niobate thin films were prepared from metal-organi c compounds by sol-gel processing. Effects of substrates and processin g parameters on K(Ta, Nb)O-3 thin film growth were studied. The result s slowed that perovskite phase of K(Ta, Nb)O-3 was formed through tile reactions of pyrochlore phases, and K(Ta, Nb)O-3 thin films with pure perovskite phase can be obtained. Tile formation mechanism of the per ovskite phase of K(Ta, Nb)O-3 on SrTiO3 and MgO single crystal substra tes was discussed, and the causes that K(Ta, Nb)O-3 thin films with pu re perovskite structure on single crystal silicon and quartz glass sub strates cannot be obtained was detailed.