High-resolution electron-energy-loss spectroscopy (HREELS) has been us
ed to characterize C-60 films up to 4 monolayers thick grown at room t
emperature on hydrogen-terminated Si(100). Our results show that compa
red with C-60 films on clean Si(100) surfaces a considerably higher de
gree of order in the as-deposited films is achieved. At low coverages
the observed C-60 vibrational modes and the Si-H vibrations of the sub
strate are essentially unshifted, indicating a van der Waals-type inte
raction between C-60 and Si(100)H(2x1). After annealing at 450 K the f
ilm order is substantially increased. Annealing at 600 K results in de
sorption of the C-60 multilayers and a hydrogen-transfer reaction from
the surface to the adsorbed monolayer molecules. When annealing the s
ample at 800 K, the remaining surface terminating hydrogen desorbs and
evidence for a change in the C-60 bonding configuration is found. Fin
ally, flashing the sample at 1300 K leads to the formation of silicon
carbide.