LITHOGRAPHY USING NANO-LENS ARRAYS MADE OF LIGHT

Citation
V. Sandoghdar et al., LITHOGRAPHY USING NANO-LENS ARRAYS MADE OF LIGHT, J. mod. opt., 44(10), 1997, pp. 1883-1898
Citations number
41
Categorie Soggetti
Optics
Journal title
ISSN journal
09500340
Volume
44
Issue
10
Year of publication
1997
Pages
1883 - 1898
Database
ISI
SICI code
0950-0340(1997)44:10<1883:LUNAMO>2.0.ZU;2-F
Abstract
We discuss the fabrication of various one and two-dimensional chromium nanostructures. A chromium atomic beam effusing out of a thermal oven is first transversally laser cooled. This well-collimated beam is the n structured and focused by the optical dipole force in a periodic lig ht field. By introducing a substrate at the focus of the atomic beam w e are able to capture this pattern directly. We discuss a few applicat ions and challenges of this young lithography technique.