Yf. Lu et al., A CLEANING MODEL FOR REMOVAL OF PARTICLES DUE TO LASER-INDUCED THERMAL-EXPANSION OF SUBSTRATE SURFACE, JPN J A P 2, 36(10A), 1997, pp. 1304-1306
Taking Van der Waals force and cleaning force due to fast thermal expa
nsion of substrate surface induced by pulsed laser irradiation into ac
count, a cleaning model was established for removal of tiny particles
from substrate surfaces. The cleaning condition and cleaning threshold
can be obtained from this model. Theoretical predictions have been ve
rified by the experimental results for removing quartz particles from
silicon substrate. For laser-induced removal of quartz particles from
silicon substrate surfaces, the cleaning threshold is about 135 mJ/cm(
2) Cleaning efficiency increases with increasing laser fluence, and la
rge particles can be removed more easily than small ones.