SUPER-WIDE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE EXCITED BY AN INDEPENDENT DOUBLE-SLOT ANTENNA

In this paper we describe an improved super-wide electron cyclotron re sonance (ECR) plasma source which consists of permanent magnets, a sol enoid coil and an independently excited double-slot antenna. Each slot antenna is prepared in the side wall of the rectangular waveguide pos itioned so that the two slot antennas are parallel and shifted by the distance of lambda(g)/4 (lambda(g): waveguide wavelength) from each ot her. An 800-mm-wide (one-dimensional distributed) plasma of oxygen gas is produced, and an ion current density uniformity within +/-5% over 770 mm in length can be obtained.