THE USE OF AC POWER ON CYLINDRICAL MAGNETRONS

Authors
HILL RJ JANSEN F
Citation
Rj. Hill et F. Jansen, THE USE OF AC POWER ON CYLINDRICAL MAGNETRONS, Journal of non-crystalline solids, 218, 1997, pp. 35-37
Citations number
18
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of non-crystalline solids → ACNP
ISSN journal
00223093
Volume
218
Year of publication
1997
Pages
35 - 37
Database
ISI
SICI code
0022-3093(1997)218:<35:TUOAPO>2.0.ZU;2-Q
Abstract
A brief review of the historical development in magnetron sputtering i s given which culminates in the research reported here. The results de monstrate stable and are-free operation of ac powered dual magnetron s ources for reactive sputtering modes in commercial environments. (C) 1 997 Elsevier Science B.V.