RF MAGNETRON SPUTTERING OF POLYMERS

Authors
BIEDERMAN H BILKOVA P JEZEK J HLIDEK P SLAVINSKA D
Citation
H. Biederman et al., RF MAGNETRON SPUTTERING OF POLYMERS, Journal of non-crystalline solids, 218, 1997, pp. 44-49
Citations number
16
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of non-crystalline solids → ACNP
ISSN journal
00223093
Volume
218
Year of publication
1997
Pages
44 - 49
Database
ISI
SICI code
0022-3093(1997)218:<44:RMSOP>2.0.ZU;2-U
Abstract
RF sputtering of polymeric materials such as polytetrafluoroethylene ( PTFE) and polyethylene (PE) has been studied. Threshold powers of 220 and 80 W for the self-sputtering glow discharge mode were found for PT FE and PE, respectively. FTIR absorption data using polarized light di sclosed a structural anisotropy of the sputtered PTFE films. A simple structural model is proposed. The first results obtained by FTIR spect roscopy of sputtered PE films are presented. (C) 1997 Elsevier Science B.V.