RF sputtering of polymeric materials such as polytetrafluoroethylene (
PTFE) and polyethylene (PE) has been studied. Threshold powers of 220
and 80 W for the self-sputtering glow discharge mode were found for PT
FE and PE, respectively. FTIR absorption data using polarized light di
sclosed a structural anisotropy of the sputtered PTFE films. A simple
structural model is proposed. The first results obtained by FTIR spect
roscopy of sputtered PE films are presented. (C) 1997 Elsevier Science
B.V.