OPTICAL-EMISSION SPECTROSCOPY OF SPUTTERED AL ATOMS FROM AL AND AL2O3SURFACES INTERACTED WITH ARQ-9)( (Q = 1)

Optical emissions from Al and Al2O3 surfaces bombarded by Arq+ (q = 1- 9) were observed in the wavelength range from 250nm to 750nm. The 4s - -> 3p and 3d --> 3p doublet transitions of Al atoms were observed. Dop pler line profiles of Al (4s(2)S(1/2) --> 3p(2)P(3/2): 396.15nm) trans ition at 45keV impact energy were observed for various charge state of Arq+. The mean velocity parallel to the surface was calculated by fit ting the line profile to the Thompson-Sigmund velocity distribution fo r the sputtered atoms. Doppler line profiles at lower impact energy (1 .84keV) for q = 3 and q = 8 charge state were observed. No significant change for these line profiles was observed. ''Coulomb explosions'' a t the Al2O3 surfaces in producing neutral excited atoms were not obser ved.