DEVELOPMENT OF A SMALL AND VERSATILE ELECTRON-BEAM ION-SOURCE USING APERMANENT-MAGNET

Authors
KUSAKABE T SANO T YURA Y OSAKA T NAKAJIMA Y NAKAI Y TAWARA H SASAO M
Citation
T. Kusakabe et al., DEVELOPMENT OF A SMALL AND VERSATILE ELECTRON-BEAM ION-SOURCE USING APERMANENT-MAGNET, Physica scripta. T, T73, 1997, pp. 378-379
Citations number
4
Categorie Soggetti
Physics
Journal title
Physica scripta. T → ACNP
ISSN journal
02811847
Volume
T73
Year of publication
1997
Pages
378 - 379
Database
ISI
SICI code
0281-1847(1997)T73:<378:DOASAV>2.0.ZU;2-M
Abstract
A small and versatile electron beam ion source with a ring permanent m agnet, called micro-EBIS, has been constructed. Ne7+ and Ar9+ ions are extracted at about 20 and 70 counts per second, respectively, with 2. 0keV/1mA electron beam. The detailed electron trajectory analysis sugg ests that a slight modification can result in better electron beam foc using and in producing higher charged ions.