SIGE QUANTUM DOTS PREPARED ON AN ORDERED MESOPOROUS SILICA COATED SI SUBSTRATE

This letter reports a new way of preparing wafer sized SiGe quantum cl ots on an ordered mesoporous sol gel silica coated Si, It was found fr om x-ray diffraction that very good regular layers of mesoscopic sized SiGe quantum dots can be formed in the silica. Initial low temperatur e photoluminescence measurements show much improved light emission of the buried dots. This technique is a potential low cost method for pro ducing quantum dot arrays. (C) 1997 American Institute of Physics. [S0 003-6951(97)02643-0].