Ao. Konstantinov et al., HIGH-VOLTAGE OPERATION OF FIELD-EFFECT TRANSISTORS IN SILICON-CARBIDE, IEEE electron device letters, 18(11), 1997, pp. 521-522
Buried-gate field-effect transistors with blocking voltages up to 600-
700 V have been fabricated in 6H polytype silicon carbide using a tren
ch technology, The devices achieve drain currents of up to 60 mA for a
channel width of 0.72 mm and have a turn-off gate voltage of about 40
V. We report on the device characteristics and analyze the performanc
e under high-voltage device operation.