M. Kaltenbacher et al., A FINITE-ELEMENT BOUNDARY-ELEMENT METHOD FOR THE SIMULATION OF COUPLED ELECTROSTATIC-MECHANICAL SYSTEMS/, Journal de physique. III, 7(10), 1997, pp. 1975-1982
Citations number
3
Categorie Soggetti
Material Science","Phsycs, Fluid & Plasmas","Physics, Applied
A recently developed modeling scheme for the numerical simulation of c
oupled electrostatic-mechanical systems such as electrostatic transduc
ers is presented. The scheme allows the calculation of dynamic rigid m
otions as well as deformations of materials in an electric field. The
coupled system, described by the equations governing the electric and
mechanical field, is solved by a combined Finite-Element/Boundary-Elem
ent-Method (FEM-BEM). Computer simulations of a micropump and of an ac
celeration sensor are presented demonstrating the efficiency of the de
veloped algorithm.