A FINITE-ELEMENT BOUNDARY-ELEMENT METHOD FOR THE SIMULATION OF COUPLED ELECTROSTATIC-MECHANICAL SYSTEMS/

A recently developed modeling scheme for the numerical simulation of c oupled electrostatic-mechanical systems such as electrostatic transduc ers is presented. The scheme allows the calculation of dynamic rigid m otions as well as deformations of materials in an electric field. The coupled system, described by the equations governing the electric and mechanical field, is solved by a combined Finite-Element/Boundary-Elem ent-Method (FEM-BEM). Computer simulations of a micropump and of an ac celeration sensor are presented demonstrating the efficiency of the de veloped algorithm.