NANOINDENTATION MEASUREMENTS OF AMORPHOUS-CARBON COATINGS

In this study, amorphous carbon coatings were deposited with thickness es ranging from 20 nm to 100 nm on single-crystal silicon substrates b y sputtering, ion beam, and cathodic are deposition techniques. An ind entation system with a three-plate transducer with electrostatic actua tion and capacitive sensor has been used to make load displacement mea surements and subsequently carry out in situ imaging of the indents. I ndentation experiments were carried out using a three-sided pyramidal (Berkovich) diamond tip. Measurements include load-displacement curves and calculation of hardness and Young's modulus of elasticity at vari ous indentation depths, studies of hysteresis behavior, creep behavior , and strain rate effect of various carbon coatings. The cathodic are coating exhibited the highest hardness and elastic modulus followed by the sputtered and ion beam coatings.