IN-SITU MASS SPECTROSCOPIC INVESTIGATION OF THE PYROLYSIS MECHANISM OF (C3H7)(2)TE AND (CH3)(2)CD DURING MOCVD

Authors
SANG WB DUROSE K BRINKMAN AW WOODS J
Citation
Wb. Sang et al., IN-SITU MASS SPECTROSCOPIC INVESTIGATION OF THE PYROLYSIS MECHANISM OF (C3H7)(2)TE AND (CH3)(2)CD DURING MOCVD, Huaxue xuebao, 55(6), 1997, pp. 578-584
Citations number
16
Categorie Soggetti
Chemistry
Journal title
Huaxue xuebao → ACNP
ISSN journal
05677351
Volume
55
Issue
6
Year of publication
1997
Pages
578 - 584
Database
ISI
SICI code
0567-7351(1997)55:6<578:IMSIOT>2.0.ZU;2-W
Abstract
Pyrolysis properties of metallo - organic precursors, di - isopropylte lluride (DIPTe) and dimethylcadmium (DMCd), in a MOCVD reactor have be en investigated by in - situ mass spectroscopy. In particular, possibl e gas phase reactions as well as pyrolysis mechanism are analysed. Int eraction between the two precursors and its influence on pyrolysis tem perature are explored under the CdTe, CdTe growth conditions.