APPLICATIONS OF NEUTRON-ACTIVATION TO MICROELECTRONIC MATERIALS RESEARCH AT THE CORNELL TRIGA REACTOR

We present results from our use of neutron activation analysis (NAA) f or the measurement and interpretation of the elemental content of mate rials being researched for applications in microelectronics. Examples include characterization of silicon-germanium and nickel silicide allo ys, magnesium silicate crystals and ceramics for packaging of integrat ed circuits. High resolution delayed X-ray spectroscopy has been succe ssfully employed as a complement to conventional gamma-ray analysis fo r determination of relative impurity concentrations. Fast neutron indu ced interferences are removed from gamma-ray spectra via the internal standard correction technique, based on the measurement of fast reacti on rates.