Sc. Mcguire et al., APPLICATIONS OF NEUTRON-ACTIVATION TO MICROELECTRONIC MATERIALS RESEARCH AT THE CORNELL TRIGA REACTOR, Journal of radioanalytical and nuclear chemistry, 192(1), 1995, pp. 65-72
We present results from our use of neutron activation analysis (NAA) f
or the measurement and interpretation of the elemental content of mate
rials being researched for applications in microelectronics. Examples
include characterization of silicon-germanium and nickel silicide allo
ys, magnesium silicate crystals and ceramics for packaging of integrat
ed circuits. High resolution delayed X-ray spectroscopy has been succe
ssfully employed as a complement to conventional gamma-ray analysis fo
r determination of relative impurity concentrations. Fast neutron indu
ced interferences are removed from gamma-ray spectra via the internal
standard correction technique, based on the measurement of fast reacti
on rates.