CALIBRATION PROCEDURE FOR PIEZORESISTANCE COEFFICIENTS OF POLYSILICONSHEETS AND APPLICATION TO A STRESS TEST CHIP

This paper describes a general calibration procedure for polysilicon p iezoresistors for two cases; the case when the crystallites have suffi ciently random orientations to assume isotropic behaviour of the polys ilicon sheet and the case in which the crystallites show a preferentia l orientation which requires a anisotropic treatment of the polysilico n layer. Finally, the theory is applied to calibrate a polysilicon res istor array used for package stress measurements. For this specific ca se, where not all stress components are of significance, it is shown t hat the procedures can be significantly simplified. (C) 1997 Elsevier Science S.A.