TRANSVERSE-WAVES TRAPPED BY METALLIC GRATINGS DEPOSITED ON THIN QUARTZ PLATES

A theoretical model has been developed to predict the properties of tr ansverse waves propagating under periodic metal strip gratings deposit ed on piezoelectric plates of finite thickness. The reliability of the model is demonstrated by comparing theoretical and experimental reson ance frequencies of synchronous devices built on 128 mu m thick AT-and Z-cut plates of quartz. Temperature sensitivities have also been meas ured experimentally. Finally, a theoretical analysis of the gravimetri c sensitivity of these devices is reported. The case of a purely elast ic load has been considered. Results are compared to state-of-the-art. (C) 1997 Elsevier Science S.A.