A SOLID-STATE PRESSURE-SENSING MICROSYSTEM FOR BIOMEDICAL APPLICATIONS

Authors
CHATZANDROULIS S GOUSTOURIDIS D NORMAND P TSOUKALAS D
Citation
S. Chatzandroulis et al., A SOLID-STATE PRESSURE-SENSING MICROSYSTEM FOR BIOMEDICAL APPLICATIONS, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 551-555
Citations number
13
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
62
Issue
1-3
Year of publication
1997
Pages
551 - 555
Database
ISI
SICI code
0924-4247(1997)62:1-3<551:ASPMFB>2.0.ZU;2-S
Abstract
A pressure-sensing system consisting of a miniature silicon capacitive -type sensor, made with the silicon fusion bonding technique, and a de tection integrated circuit is presented. The entire system converts pr essure changes, in the pressure range useful for biomedical applicatio ns, to frequency changes. The system is equipped with a reference capa citor to cancel out the temperature dependence and the ageing effects. (C) 1997 Elsevier Science S.A.