INTEGRATED MULTIFUNCTIONAL HUMIDITY SENSOR

Citation
Sa. Krutovertsev et al., INTEGRATED MULTIFUNCTIONAL HUMIDITY SENSOR, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 582-585
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09244247
Volume
62
Issue
1-3
Year of publication
1997
Pages
582 - 585
Database
ISI
SICI code
0924-4247(1997)62:1-3<582:IMHS>2.0.ZU;2-T
Abstract
The construction and characteristics of sorption polymeric relative hu midity sensors, sorption SiOx microhumidity sensors and condensation-t ype (dew-point) sensors are compared. The characteristics of the senso rs are examined in a dew-point range from -80 to +20 degrees C. An int egrated multifunctional humidity sensor for measurements in a wide hum idity range at different conditions has been developed. The sensors ar e intended for use in various branches of industry, and in scientific research. (C) 1997 Elsevier Science S.A.