A LOW-FREQUENCY MICROMECHANICAL RESONANT VIBRATION SENSOR FOR WEAR MONITORING

Authors
FRITSCH H LUCKLUM R IWERT T HAUPTMANN P SCHOLZ D PEINER E SCHLACHETZKI A
Citation
H. Fritsch et al., A LOW-FREQUENCY MICROMECHANICAL RESONANT VIBRATION SENSOR FOR WEAR MONITORING, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 616-620
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
62
Issue
1-3
Year of publication
1997
Pages
616 - 620
Database
ISI
SICI code
0924-4247(1997)62:1-3<616:ALMRVS>2.0.ZU;2-D
Abstract
A micromechanical resonant vibration sensor (MRVS) is presented with a geometrical structure that is designed for the detection of vibration s in the low-frequency range. The MRVS is distinguished from conventio nal piezoelectric and micromechanical acceleration sensors by the util ization of the resonance effect. The signal-to-noise ratio increases s ignificantly when the sensor is excited with the designed frequencies. The vibrational properties of the MRVS have been investigated in the laboratory. Examples of the sensor response to different vibrational s ources are analysed under industrial conditions. The capability of the sensor principle for wear monitoring is discussed. (C) 1997 Elsevier Science S.A.