LASER-ASSISTED PARTICLE REMOVAL DRY-CLEANING OF CRITICAL SURFACES

Laser assisted particle removal (LAPR) is a technique for removing min ute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the en ergy transfer medium, either directly or via conduction from the subst rate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transf er medium, water in this case, has been studied and a technique develo ped for monitoring the condensation and amount of water condensed on t he substrate. (C) 1997 Elsevier Science S.A.