The process of titanium hydride oxidation was investigated by several
methods. The results of TiHx thermal oxidation investigation show that
it is the presence of hydrogen in hydride phases which influence the
dynamics of titanium hydride oxidation (Ti-x-->TiHx-yOz-->Ti2O-->TiO2)
. Unfortunately the heating of titanium hydride in air results in samp
le caking. Hence it is impossible to obtain the pure titanium dioxide
by using this method. The oxidation of titanium hydride in the low tem
perature oxygen plasma of microwave and glow discharges was also inves
tigated. It is shown that the process of titanium hydride oxidation in
O2-plasma of a glow discharge continues step-by-step and as in the ca
se of thermal TiHx oxidation is also accompanied by sample caking. The
efficiency of the oxidation process depends on the temperature and th
e time of treatment. The action of a low temperature oxygen plasma of
microwave discharge upon titanium hydride didn't cause sample caking a
nd led to rutile formation. The probable reasons why TiHx effectively
oxidizes solely to rutile in a microwave discharge are discussed. (C)
1997 Elsevier Science S.A.