3-DIMENSIONAL NUMERICAL-MODEL FOR THERMAL-ANALYSIS IN X-RAY-IRRADIATED PHOTORESISTS WITH CYLINDRICAL DOMAIN

A three-dimensional X-ray irradiated resist with a cylindrical domain is modeled numerically, based on the hybrid finite element and the gen eralized Marchuk splitting scheme, and the parallel Gaussian eliminati on technique, in order to analyze the temperature distribution and the potential temperature rise. The hybrid scheme is proved to be uncondi tionally stable. This numerical procedure is simple and efficient and can be generalized to multilayers, since it converts three-dimensional computations into a sequence of one-and hue-dimensional computations. Numerical results are presented with regard to the temperature distri bution and the maximum temperature rise.