W. Dai et R. Nassar, 3-DIMENSIONAL NUMERICAL-MODEL FOR THERMAL-ANALYSIS IN X-RAY-IRRADIATED PHOTORESISTS WITH CYLINDRICAL DOMAIN, Numerical heat transfer. Part A, Applications, 32(5), 1997, pp. 517-530
A three-dimensional X-ray irradiated resist with a cylindrical domain
is modeled numerically, based on the hybrid finite element and the gen
eralized Marchuk splitting scheme, and the parallel Gaussian eliminati
on technique, in order to analyze the temperature distribution and the
potential temperature rise. The hybrid scheme is proved to be uncondi
tionally stable. This numerical procedure is simple and efficient and
can be generalized to multilayers, since it converts three-dimensional
computations into a sequence of one-and hue-dimensional computations.
Numerical results are presented with regard to the temperature distri
bution and the maximum temperature rise.