This paper presents the synthesis and the characterisation of various
chromium carbide compounds, Thin Cr23C6 films were deposited by reacti
ve sputtering while Cr7C3 films were formed by the carburisation of ch
romium films in a CH4/H-2 atmosphere, CrxCy powders were synthesised f
rom various precursors (Cr, CrN, Cr2O3) by reaction with CH4/H-2 at hi
gh temperature. The samples were characterised by AES, XRD and electro
n diffraction. The effects of the experimental parameters (gas composi
tion, temperature, reaction time) on the purity, the phase formed and
the composition of the product of reaction are examined and discussed.
(C) 1997 Elsevier Science B.V.