M. Nishida et al., SINGLE-CRYSTALLINE SILICON SOLAR-CELL WITH PP(-SI SUBSTRATE AND MU-C-SI-H FILM() HETEROJUNCTION OF C), Solar energy materials and solar cells, 48(1-4), 1997, pp. 131-136
Annealing effects of the single-crystalline silicon solar cells with h
ydrogenated microcrystalline silicon (mu c-Si:H) film were studied to
improve the conversion efficiency. Boron-doped (p(+)) mu c-Si:H film w
as deposited in a RF plasma enhanced chemical vapor deposition system
(RF plasma CVD) on the rear surface of the cell. With the optimized an
nealing conditions for the substrate, the conversion efficiency of 21.
4% (AM1.5, 25 degrees C, 100 mW/cm(2)) was obtained for 5 x 5 cm(2) ar
ea single crystalline-solar cell.