DEVELOPMENT OF LOW-COST PRODUCTION TECHNOLOGIES FOR POLYCRYSTALLINE SILICON SOLAR-CELLS

To develop a technology of forming grooves for low cost cell productio n, a multi-blade wheel grinding method was investigated. The process t ime of groove formation on the surface of 10 x 10 cm(2) polycrystallin e silicon substrate was reduced to 30 s by a newly developed high-spee d groove formation machine. Simultaneous formation of junction and ant i-reflection coating by atmospheric pressure chemical vapor deposition (APCVD) technique was also investigated. For electrodes formation pro cess, single firing method for both side electrodes made possible to s implify the firing process and to speed up from a conventional speed o f 400 mm/min to 5000 mm/min.