The performance of amorphous silicon based solar cells depends on the
tailored properties of the various layer materials making up the cell
structure as well as on the properties and on the design of the interf
ace regions between the layers. The electronic properties related to t
he various interfaces are markedly influenced by the Fermi level posit
ion within these regions, and by structural properties and chemical co
mpositions resulting from the preparation conditions. Results are pres
ented for the p/i and the TCO/p interfaces and discussed with respect
to device performance. Further examples of interface effects are descr
ibed which are related to chemical reactions and hydrogen diffusion in
the course of sample preparation.