SOL-GEL CHANNEL WAVE-GUIDE ON SILICON - FAST DIRECT IMPRINTING AND LOW-COST FABRICATION

Development of integrated optical devices depends on the possibility t o realize them for the lowest cost. In this paper we present an improv ed technique based on the sol-gel process enabling to fabricate low lo ss (<0.1 dB/cm) channel waveguides for use in the 1.55 mu m telecommun ication window. The channel waveguides are directly imprinted in a red uced time, thanks to an improved sol synthesis. This enables a precise control of the geometries of the three-dimensional waveguides. Moreov er the production cost is diminished. (C) 1997 Elsevier Science B.V.