PLASMA POLYMERIZATION OF TRIMETHYLSILANE IN CASCADE ARC-DISCHARGE

Plasma polymerization of trimethylsilane (TMS) in cascade are discharg e was experimentally investigated. It was found that the deposition ra tes of methane and TMS plasma polymer were dependent on plasma paramet ers, and the surface characteristics of plasma polymer were also depen dent on plasma variables. The following plasma variables were studied: are current, argon flow rate, TMS flow rate, chamber pressure, substr ate axial, and radial positions. Carbon, silicon, and oxygen were the main elements observed in TMS polymer films obtained by x-ray photoele ctron spectroscopy(XPS). Powder-like TMS polymer films were observed b y scanning electron microscopy (SEM). The size distribution of the pow der-like particles was strongly dependent on deposition parameters. (C ) 1997 John Wiley & Sons, Inc.