X-RAY-DIFFRACTION AND SCANNING ELECTRON-MICROSCOPY OBSERVATION OF LEAD-ZIRCONATE-TITANATE THICK-FILM FORMED BY GAS DEPOSITION METHOD

A lead zirconate titanate (Pb(Zr, Ti)O-3, PZT) thick film was produced using the Jet Molding System which was developed from a gas depositio n method. Some of the characteristics of the deposited lead zirconate titanate were determined by X-ray diffraction, scanning electron micro scopy and atomic force microscopy. The dielectric constant was determi ned to be 760 after 500 degrees C and 10 min of heat treatment for non polarized sample. Through scanning electron microscope observation, so me properties of the deposition of ultrafine particles of PZT were det ermined. A joining of the deposited particles could be observed, which means a kind of sintering was caused by the deposition process. Cryst al structure analysis was carried out using X-ray diffraction for stru ctural comparison before and after deposition. The perovskite structur e of PZT was proved to be retained during the deposition process.