M. Ichiki et al., X-RAY-DIFFRACTION AND SCANNING ELECTRON-MICROSCOPY OBSERVATION OF LEAD-ZIRCONATE-TITANATE THICK-FILM FORMED BY GAS DEPOSITION METHOD, JPN J A P 1, 36(9B), 1997, pp. 5815-5819
A lead zirconate titanate (Pb(Zr, Ti)O-3, PZT) thick film was produced
using the Jet Molding System which was developed from a gas depositio
n method. Some of the characteristics of the deposited lead zirconate
titanate were determined by X-ray diffraction, scanning electron micro
scopy and atomic force microscopy. The dielectric constant was determi
ned to be 760 after 500 degrees C and 10 min of heat treatment for non
polarized sample. Through scanning electron microscope observation, so
me properties of the deposition of ultrafine particles of PZT were det
ermined. A joining of the deposited particles could be observed, which
means a kind of sintering was caused by the deposition process. Cryst
al structure analysis was carried out using X-ray diffraction for stru
ctural comparison before and after deposition. The perovskite structur
e of PZT was proved to be retained during the deposition process.