EFFECTS OF ASPECT RATIO OF LEAD-ZIRCONATE-TITANATE ON 1-3-PIEZOELECTRIC COMPOSITE PROPERTIES

An array of lead zirconate titanate (PZT) rods whose cross section is 25 mu m square was fabricated using synchrotron radiation (SR) lithogr aphy, and the effects of the aspect ratio (height/width) of the PZT ro d on 1-3 piezoelectric composite properties were studied. The aspect r atio was between 3 and 9. Mechanical quality factor and acoustic imped ance were found to depend weakly on the aspect ratio. However, electro mechanical coupling coefficients were found to increase as the aspect ratio increased. Based on the result of deformation simulation by the finite element method (FEM), this dependence was found to be caused by the increase in piezoelectric coefficients as the aspect ratio increa sed.