ELECTRICAL AND THERMAL SIMULATION OF LOCAL-EFFECTS FOR ELECTROMIGRATION

Authors
BORGARINO M PETRESCU V BRIZZOLARA L DEMUNARI I FANTINI F
Citation
M. Borgarino et al., ELECTRICAL AND THERMAL SIMULATION OF LOCAL-EFFECTS FOR ELECTROMIGRATION, Semiconductor science and technology, 12(11), 1997, pp. 1369-1377
Citations number
17
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
12
Issue
11
Year of publication
1997
Pages
1369 - 1377
Database
ISI
SICI code
0268-1242(1997)12:11<1369:EATSOL>2.0.ZU;2-Y
Abstract
The aim of this work is to investigate the distribution of the local c urrent density and temperature gradients along the test patterns emplo yed for the evaluation of the electromigration phenomena in metal trac ks. The impact of the line shape is taken into account. The investigat ion has been performed by means of a 2D simulator based on a FEM solve r.