STRUCTURE-ANALYSIS OF TEFLON-LIKE THIN-FILMS SYNTHESIZED BY ION-BEAM SPUTTERING DEPOSITION

Authors
WANG LD LI HB HE JL HE XM LI WZ WANG YH LI HD
Citation
Ld. Wang et al., STRUCTURE-ANALYSIS OF TEFLON-LIKE THIN-FILMS SYNTHESIZED BY ION-BEAM SPUTTERING DEPOSITION, Materials letters, 33(1-2), 1997, pp. 77-78
Citations number
4
Categorie Soggetti
Material Science","Physics, Applied
Journal title
Materials letters → ACNP
ISSN journal
0167577X
Volume
33
Issue
1-2
Year of publication
1997
Pages
77 - 78
Database
ISI
SICI code
0167-577X(1997)33:1-2<77:SOTTSB>2.0.ZU;2-F
Abstract
Teflon-like thin films were synthesized by ion beam sputtering a teflo n target and their structures were studied by XPS and FT-IR. XPS showe d that the films consisted mainly of CF, bonds, a few C-C bonds and C- H bonds; FT-IR indicated that the absorption peaks of the thin films c onsisted of the strongest absorption peak of C-F and the characteristi c absorption peaks of teflon. These structural characteristics of the thin films correspond to the molecular structure of teflon. (C) 1997 E lsevier Science B.V.