THE ANGULAR-DEPENDENCE OF THE SPUTTERING YIELD OF AG, NI AND FE BY HIGH-ENERGY NOBLE-GAS IONS

Authors
WETZ P KRUGER W SCHARMANN A SCHARTNER KH
Citation
P. Wetz et al., THE ANGULAR-DEPENDENCE OF THE SPUTTERING YIELD OF AG, NI AND FE BY HIGH-ENERGY NOBLE-GAS IONS, Radiation measurements, 27(4), 1997, pp. 569-574
Citations number
15
Categorie Soggetti
Nuclear Sciences & Tecnology
Journal title
Radiation measurements → ACNP
ISSN journal
13504487
Volume
27
Issue
4
Year of publication
1997
Pages
569 - 574
Database
ISI
SICI code
1350-4487(1997)27:4<569:TAOTSY>2.0.ZU;2-3
Abstract
The angular dependence of the sputtering yield of Ag, Ni and Fe was in vestigated with 200 keV and 800 keV Ar+ and Xe+ ions. The angle of inc idence varied from 0 degrees to 86 degrees. The experimental results a re compared with the sputtering yields from a semiempirical formula of Y. Yamamura. The influence of the electronic stopping power of the pe netrating ions is discussed. (C) 1997 Elsevier Science Ltd.