Cr. Cho et al., SOLUTION DEPOSITION AND HETEROEPITAXIAL CRYSTALLIZATION OF LANIO3 ELECTRODES FOR INTEGRATED FERROELECTRIC DEVICES, Applied physics letters, 71(20), 1997, pp. 3013-3015
Electrically conducting LaNiO3 (LNO) thin layers were deposited on (10
0)SrTiO3 (STO) and (100)LaAlO3 (LAO) substrates and crystallized at te
mperatures between 700 and 800 degrees C. The chemical method of depos
ition was solution sol-gel processing. X-ray 2 theta and rocking curve
measurements, phi scans, and atomic force microscopy studies revealed
the degree of crystallinity and heteroepitaxy for the integrated elec
trodes. The full-width at half-maximum for (100) LNO deposited on LAO
and STO was 0.16 degrees and 0.25 degrees, respectively. Surface bondi
ng states and chemistry were examined by x-ray photoelectron spectrosc
opy. The room temperature resistivity of LNO electrodes deposited on S
TO and LAO was 460 and 340 mu Omega cm, respectively. (C) 1997 America
n Institute of Physics.